Coating processes – Spray coating utilizing flame or plasma heat
Patent
1998-05-28
2000-01-18
Breneman, Bruce
Coating processes
Spray coating utilizing flame or plasma heat
427452, 427456, 427488, 427489, 118715, 219119, B05D 102
Patent
active
060155957
ABSTRACT:
An apparatus for forming a film on a substrate includes a gas inlet and an insert attached to the gas inlet, the insert including a deposition source material such as lithium. To form the film on the substrate, the substrate is mounted in a vacuum chamber. After the vacuum chamber is pumped clown to a subatmospheric pressure, a first process gas such as argon is provided through the gas inlet and insert and into a plasma region proximate the substrate. Power is then coupled to generate a plasma inside of the insert which heats the insert and causes the deposition source material to vaporize. The deposition source material vapor is mixed with a plasma polymerizable material in the plasma region proximate the substrate causing a plasma enhanced chemical vapor deposition (PECVD) thin film such as silicon oxide including the deposition source material (e.g. lithium) to be deposited on the substrate.
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Breneman Bruce
Steuber David E.
Torres Norca L.
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