Process of measuring coplanarity of circuit pads and/or grid arr

Details Process of measuring coplanarity of circuit pads and/or grid arr Process of measuring coplanarity of circuit pads and/or grid arr

1996-10-15

1998-03-31

Font, Frank G.

Optics: measuring and testing

By polarized light examination

With light attenuation

356371, 356237, 356376, G01B 1130

Patent

active

057344752

ABSTRACT:
A process of measuring coplanarity of an array of conductive elements on a circuit device is disclosed. Light is impinged from a reference plane onto an element of the array at a predetermined angle of incidence. Light is also impinged from the reference plane onto a reflective feature on a measurement plane determined by three points of the circuit device having highest elevations from a base of the circuit device, at the same predetermined angle of incidence. A response of the light impinged onto the element of the array and the reflective feature on the measurement plane is measured to determine coplanarity of the array.

REFERENCES:
patent: 4282456 (1981-08-01), Stein
patent: 4343553 (1982-08-01), Nakagawa et al.
patent: 4688939 (1987-08-01), Ray
patent: 4801065 (1989-01-01), Colquitt et al.
patent: 5455870 (1995-10-01), Sepai et al.
patent: 5465152 (1995-11-01), Bilodeau et al.
patent: 5526204 (1996-06-01), French et al.

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