Method and apparatus for processing workpieces

Details Method and apparatus for processing workpieces Method and apparatus for processing workpieces

1979-07-25

1981-07-28

Newsome, John H.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

134 1, 219 1055R, 219 1055A, 427314, 427 58, B05D 314, B05B 1506

Patent

active

042810310

ABSTRACT:
An arrangement is provided for performing a plurality of processes on workpieces, such as silicon wafers, while they remain at a single processing station. The processing operations include scrubbing, coating, developing, and/or baking the wafer without removing it from a work support at the work station. The apparatus includes a transferring device for automatically transferring the wafer from a cassette to a work support. In addition, positioned about the centrally-located work support is a scrubbing device for scrubbing the wafer and a liquid dispensing device for dispensing liquid on the wafer. Each is movable into and out of position over the work support. In addition, the work support is surrounded by a microwave chamber for baking the wafer while it remains on the work support.

REFERENCES:
patent: 3457894 (1969-07-01), David
patent: 3479222 (1969-11-01), David et al.
patent: 3803660 (1974-04-01), Jividen et al.
patent: 3898411 (1975-08-01), Smeets
patent: 4062463 (1977-12-01), Hillman et al.
patent: 4123306 (1978-10-01), Landry

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