Optical processing furnace with quartz muffle and diffuser plate

Details Optical processing furnace with quartz muffle and diffuser plate Optical processing furnace with quartz muffle and diffuser plate

1995-06-05

1996-11-19

Jeffery, John A.

Electric resistance heating devices

Heating devices

Radiant heater

219390, 219411, 392408, 250504R, 118724, 427557, 359599, 437247, H05B 102, H01L 21205

Patent

active

055771572

ABSTRACT:
An optical furnace for annealing a process wafer comprising a source of optical energy, a quartz muffle having a door to hold the wafer for processing, and a quartz diffuser plate to diffuse the light impinging on the quartz muffle; a feedback system with a light sensor located in the wall of the muffle is also provided for controlling the source of optical energy.

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