Probe card with vertical needle for enabling improved wafer test

Details Probe card with vertical needle for enabling improved wafer test Probe card with vertical needle for enabling improved wafer test

1998-03-26

2000-07-11

Nguyen, Vinh P.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324762, 324761, G01R 3102

Patent

active

060878401

ABSTRACT:
An improved probe card with a vertical needle is provided which ensures required needle pressure even when there is a significant variation of probe needles in a height direction. Upper and lower portions of probe needle are respectively supported by upper and lower guide plates. Upper portion of probe needle is bent in an L shape. A printed substrate is provided on upper guide plate.

REFERENCES:
patent: 4506215 (1985-03-01), Coughlin
patent: 4554506 (1985-11-01), Faure et al.
patent: 4901013 (1990-02-01), Benedetto et al.
patent: 5525911 (1996-06-01), Marumo et al.

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