Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1995-06-07
1996-11-19
Grimley, Arthur T.
Photocopying
Projection printing and copying cameras
Step and repeat
355 67, G03B 2742, G03B 2754
Patent
active
055768016
ABSTRACT:
A projection exposure apparatus includes illuminating optical means for illuminating a projection negative, and projection optical means for projection-exposing the projection negative illuminated by the illuminating optical means onto a substrate, the illuminating optical means including light source means for supplying exposure light, annular light source forming means for forming an annular secondary light source by the light from the light source means, and condenser means for condensing the light beam from the annular light source forming means on the projection negative, and is designed to satisfy the following condition:
REFERENCES:
patent: 5367404 (1994-11-01), Hayata
Kameyama Masaomi
Ushida Kazuo
Grimley Arthur T.
Kerner Herbert V.
Nikon Corporation
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