Scanning microscope and scanning mechanism for the same

Details Scanning microscope and scanning mechanism for the same Scanning microscope and scanning mechanism for the same

1990-11-05

1992-01-14

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

359368, H01J 314, H01J 516

Patent

active

050813498

ABSTRACT:
A scanning microscope comprises an objective lens for converging a laser beam, which serves as a light beam irradiated to a sample, to a small light spot on the sample, and a scanning mechanism for scanning the light spot on the sample in a main scanning direction and a sub-scanning direction. The light beam, which is radiated out of the sample during the scanning, is photoelectrically detected and converted into an image signal representing an enlarged image of the sample. The scanning mechanism is provided with a main scanning device comprising a beam splitter, which splits the laser beam into two laser beams such that their center points deviate from each other, a light modulating device, which regularly modulates the intensity of at least one of the two laser beams such that the modulation frequency varies for the two laser beams, and an optical device, which adjusts the beam profiles of the laser beams on the sample such that the beam profiles have a flat shape which is long in the direction along which the two laser beams are lined up.

REFERENCES:
patent: 4584484 (1986-04-01), Hutchin
patent: 4614410 (1986-09-01), Ikenaga et al.
patent: 4734578 (1988-03-01), Horikawa
patent: 4893008 (1990-01-01), Horikawa

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