Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent
1990-08-20
1991-09-10
Anderson, Bruce C.
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
250396ML, 2504922, H01J 3730, H01J 37304
Patent
active
050476467
ABSTRACT:
A method of correcting astigmatism of a variable shaped beam uses a charged beam lithographic apparatus having a deflector for generating the shaped beam, a focus correction coil for adjusting a focus of the shaped beam, and astigmatism correction coils for correcting the astigmatism of the shaped beam. The method comprises the steps of adjusting the focus of the shaped beam by using the focus correction coil, and correcting the astigmatism of the shaped beam by using the astigmatism correction coils, the step of correcting the astigmatism of the shaped beam including the substeps of measuring first edge resolutions of the shaped beam in an arbitrary first direction and a second direction perpendicular to the first direction, and correcting first astigmatism in the first and second directions on the basis of the first edge resolutions, and measuring second edge resolutions in a third direction oblique to the first direction and a fourth direction perpendicular to the third direction, and correcting second astigmatism in the third and fourth directions on the basis of the second edge resolutions.
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Hattori Kiyoshi
Ikeda Naotaka
Nishimura Eiji
Tamamushi Shuichi
Wada Hirotsugu
Anderson Bruce C.
Kabushiki Kaisha Toshiba
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