Method of production of fet regulatable field emitter device

Details Method of production of fet regulatable field emitter device Method of production of fet regulatable field emitter device

1994-05-12

2000-07-11

Bowers, Charles

Semiconductor device manufacturing: process

Electron emitter manufacture

H01L 2100

Patent

active

060871938

ABSTRACT:
A non-power generating current limiting device such as a field effect transistor is provided to output a regulated current in dependence upon a control voltage. An electron field emitter is connected to a drain or output of the non-power generating current limiting device to receive the regulated current. A tip of the electron field emitter emits electrons towards a collector anode. An extractor gate can be provided between the electron field emitter and the collector anode to control the rate of electron emission from the electron field emitter. Because the non-power generating current limiting device regulates the current to the electron field emitter, a maximum current output of the electron field emitter is limited to the regulated current from the voltage controlled current source. The electron field emitter is thus protected from destruction due to excess current. The non-power generating current limiting device can also be used to modulate electron emission from the field emitter.

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H.F. Gray et. al., IE DM 91-201, 1991 pp 201-4.

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