Process for the production of accelerometers using silicon on in

Details Process for the production of accelerometers using silicon on in Process for the production of accelerometers using silicon on in

1993-12-27

1996-11-19

Fourson, George

Fishing, trapping, and vermin destroying

437 89, 437225, 437901, 1566261, 257254, 257417, 257418, H01L 21465

Patent

active

055762506

ABSTRACT:
A process for the production of accelerometers using the silicon on insulator method. The process comprises the following stages: a) producing a conductive monocrystalline silicon film on a silicon substrate and separated from the latter by an insulating layer; b) etching the silicon film and the insulating layer up to the substrate in order to fix the shape of the mobile elements and the measuring devices; c) producing electric contacts for the measuring devices; d) partial elimination of the insulating layer in order to free the mobile elements, the remainder of the insulating layer rendering integral the substrate and the moving elements.

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