Fishing – trapping – and vermin destroying
Patent
1995-06-02
1996-11-19
Breneman, R. Bruce
Fishing, trapping, and vermin destroying
437228, 427 10, 324 7675, 374120, 374184, H01L 2166, H01L 21465
Patent
active
055762247
ABSTRACT:
A method and structure for sensing data such as temperature with respect to objects such as silicon wafers undergoing fabrication or other processes involve the use of a monitor element of material and configuration similar to that of the objects being processed. A structure such as a closed loop or segment of a spiral may be formed on the surface of the monitor element, and acts as a secondary coil when brought into operative relation with a transformer structure which includes a primary coil, a current source and a sensing device. The sensing device senses variations in the electrical characteristics in the primary coil, caused by the presence of the monitor element, and can thereby determine the temperature or other desired data relating to the monitor element, which is substantially the same as comparable data for the objects being processed.
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Allman Derryl D. J.
Cole Richard K.
Hass Crystal J.
Von Thun Matthew S.
Yakura James P.
AT&T Global Information Solutions Company
Bailey Wayne P.
Breneman R. Bruce
Hyundai Electronics America
Symbios Logic Inc.
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