Fluid handling – Systems – Multiple inlet with multiple outlet
Patent
1998-09-02
2000-07-11
Shaver, Kevin
Fluid handling
Systems
Multiple inlet with multiple outlet
137884, F16K 1100
Patent
active
060857838
ABSTRACT:
Modular chemical delivery substrate blocks which have both directional and transverse flow direction capabilities united in a single modular substrate block and which utilize localized fastener substrate joining techniques unique to such a design. The design, which incorporates current semiconductor industry standards (such as SEMI 2787.1), dictates specific mechanical dimensional constraints and bolt joining localities that are also presented herein. Likewise, the mechanical features and constraints specific to attaching other direct chemical process flow substrate blocks to such unified multidirectional flow blocks are described. Use of this united multi-flow block design results in fewer seals and fasteners required to provide multi-directional flow regimes, reduces the total chemical wetted volume of the chemical delivery streams, minimizes modular chemical delivery system stacking height, and reduces system weight.
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Semi Draft Doc. 2787 "Specification For Surface Mount Interface of Gas Distribution Components," before Jun. 1998, 1 page.
Semi Draft Doc. 2787.1 "Specification For Surface Mount Interface of Gas Distribution Components-Counterbore Design," before Jun. 1998, 2 pages.
Bastianelli John
Kowert Robert C.
Shaver Kevin
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