Capacitor array sensors for determining conformity to surface sh

Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters

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324690, 901 33, 901 46, 361283, G01B, G01B 734

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active

049085743

ABSTRACT:
A sensor for sensing and quantifying the conformity of a workpiece surface contour to a predetermined design contour. The sensor consists of an array of capacitor elements on a surface having the negative image of the predetermined design contour, against which the workpiece is mated. In operation, each of the capacitor elements and the workpiece are connected to a corresponding oscillator circuit so that the frequency of each circuit is a function of the capacitance between the individual plate element and the workpiece, while the capacitance is a function of the distance between the individual plate element and the workpiece. Hence the overall output of the circuits is a function of the conformity of the workpiece surface contour to the contour or topology of the sensor surface.

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patent: 4557386 (1985-12-01), Buckley et al.
patent: 4588348 (1986-05-01), Beni et al.
patent: 4611296 (1986-09-01), Niedermayr

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