Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1983-03-30
1984-10-02
Morgenstern, Norman
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427 63, 4271263, 427282, 4272554, 204164, H01L 3922, H01L 3924
Patent
active
044748280
ABSTRACT:
A novel method of depositing the oxide barrier junction on a base electrode of a Josephson junction device is provided. An ionized oxygen plasma region is generated juxtaposed the surface of the base electrode to be oxidized. The pressure of the oxygen in the vacuum chamber is held at a predetermined high pressure where the zero voltage supercurrent is found to be independent of oxygen pressure variations and the flow of oxygen through the vacuum chamber is stabilized at the optimum minimum necessary for growth of the oxide barrier junction. The oxide barrier junctions so produced have consistent and predictable supercurrent densities.
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patent: 3875068 (1975-04-01), Mitzel
patent: 4232057 (1980-11-01), Ray et al.
Broom et al., IBM J. Res. Develop., vol. 24, No. 2, Mar. 1980, pp. 206-211.
Donaldson et al., IEEE Transactions on Electron Devices, vol. ED-27, No. 10, Oct. 1980, pp. 1988-1997.
Greiner et al., IBM J. Res. Develop., vol. 24, No. 2, Mar. 1980, pp. 195-205.
Havemann et al., J. Vac. Sci. Technol. 15 (2), Mar./Apr. 1978, pp. 392-395.
Coleman John A.
Josephs Richard M.
Young Peter L.
Bueker Richard
Morgenstern Norman
Scott Thomas J.
Sowell John B.
Sperry Corporation
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