Opto-electronic position sensing method

Electric heating – Metal heating – By arc

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73432L, 73DIG11, 219121EM, 250492B, 346 76L, B23K 900

Patent

active

040741044

ABSTRACT:
An opto-electronic apparatus for sensing the position or inspecting the condition of a target, which is capable of at least partially reflecting light in a scattered manner, includes an incident light source and means to direct light from the source in a narrow incident beam onto the target along an incident beam axis. A photoelectric sensor, which includes light collecting and focusing means as well as photosensitive means for receiving the focused light, provides for collecting and focusing the reflected scattered light along a reflected light axis of the light collecting and focusing means to the photosensitive means which provides an output signal including a portion which is a function of displacement of the focused light from a reference of the photosensitive means. Such reference represents the position of the axis intersection between the incident beam axis and the reflected light axis of the light collecting and focusing means. Also included in the apparatus is sensing means responsive to the output signal of the photosensitive means to sense displacement of the target, along the incident beam axis, in respect to the axis intersection.

REFERENCES:
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patent: 3387109 (1968-06-01), Bruma et al.
patent: 3467099 (1969-09-01), Lotmar
patent: 3667846 (1972-07-01), Nater et al.
patent: 3671726 (1972-06-01), Kerr
patent: 3689159 (1972-09-01), Taniguchi
patent: 3821558 (1974-06-01), Mansfield
patent: 3903392 (1975-09-01), Konig et al.
IBM Disclosure -- Microprinter for wafer or chip identification -- Schaedlich -- 1-1973.

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