Electrode configuration for vibrating beam transducers

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

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310321, 310365, 310368, 310370, H01L 4108

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049298607

ABSTRACT:
A technique is described for tailoring the configuration of electrodes on a piezoelectric beam such that the tendency of the beam to vibrate in a predetermined flexure mode is enhanced. The mode has a predetermined longitudinal strain versus longitudinal position profile. At least two electrodes are mounted on the beam, and the configuration of at least one electrode varies as a function of longitudinal position, such that when a voltage difference is applied between the electrodes, the longitudinal force produced by the electrodes, as a function of longitudinal position, approximates the longitudinal strain versus longitudinal position profile. The configuration may be varied by varying the width of the electrode or the position of the electrode on the underlying beam surface.

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