Method for controlling a micro electro-mechanical systems and ve

Details Method for controlling a micro electro-mechanical systems and ve Method for controlling a micro electro-mechanical systems and ve

1997-11-12

2000-02-22

Le, Que T.

Radiant energy

Photocells; circuits and apparatus

Photocell controlled circuit

2502141, 250206, H01J 4014

Patent

active

060283017

ABSTRACT:
The present invention discloses a method for controlling a micro electro-mechanical system manufactured using micro-machining technology and verifying the state thereof and, more particularly, to a method for controlling the micro electro-mechanical system and verifying the state thereof using light so that the voltage applied to each MEMS is determined by the intensity of the light incident on two optical windows of the symmetric SEEDs respectively by attaching the symmetric SEEDs every MEMS to electrically connect one of the SEEDs to the MEMS in parallel, instead of a conventional method in which the voltage from the control circuit is applied directly to the MEMS via wires.

REFERENCES:
patent: 4967068 (1990-10-01), Lentine et al.
patent: 5093565 (1992-03-01), Lentine
patent: 5385632 (1995-01-01), Goossen

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