Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Coating moving substrate
Patent
1997-11-13
2000-02-22
Gorgos, Kathryn
Electrolysis: processes, compositions used therein, and methods
Electrolytic coating
Coating moving substrate
204212, 204DIG7, C25D 500
Patent
active
060276312
ABSTRACT:
An electroplating system includes shield(s) to control the thickness profile of a metal electrodeposited onto a substrate. The shield(s) are positioned between the anode and the cathode in a standard electroplating apparatus with a device for rotating the plating surface. The cathode is rotated so that the shield(s) in conjunction with the rotation of the cathode selectively alters or modulates a time average of the electric field characteristics between the anode and the cathode. The modulated electric field is used to control the electrodeposition rate at selected area(s) of the plating surface of the cathode, thereby causing the metal deposited on the cathode to have a modified thickness profile.
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Gorgos Kathryn
Novellus Systems Inc.
Smith-Hicks Erica
LandOfFree
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