Projection exposure apparatus

Details Projection exposure apparatus Projection exposure apparatus

1993-01-25

1994-04-05

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, G03B 2754, G03B 2742

Patent

active

053009711

ABSTRACT:
A projection exposure apparatus is provided with a light source generating pulsed light, a rotary deflecting prism for deviating the light beam from the light source, fly's eye lenses for forming surface light sources in succession by thus deviated light beam, and a condenser lens for condensing the light from the fly's eye lens for illuminating the reticle. The pulsed light from the light source is alternately introduced into the fly's eye lenses by every pulse or by every plural number of pulses.

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patent: 4988188 (1991-01-01), Ohta
patent: 5097291 (1992-03-01), Suzuki
patent: 5121160 (1992-06-01), Sano et al.
patent: 5191374 (1993-03-01), Hazama et al.
patent: 5237367 (1993-08-01), Kudo

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