Method of selecting a spatial energy spread within an electron b

Details Method of selecting a spatial energy spread within an electron b Method of selecting a spatial energy spread within an electron b

1993-02-09

1994-04-05

Berman, Jack I.

Radiant energy

Electron energy analysis

250307, 250311, H01J 4944

Patent

active

053007751

ABSTRACT:
A method and apparatus for selecting the spatial energy spread of an electron beam for producing an image of an object, as in an electron microscope. An energy-dispersive member is arranged in the vicinity of the electron beam source to widen the electron beam in a dispersion direction. Selection of an energy dispersion within the beam is achieved by selecting a number of pixels having such a local energy dispersion in the image plane of the object.

REFERENCES:
patent: 3979590 (1976-09-01), Andersen
patent: 4851670 (1989-07-01), Krivanek
patent: 4942298 (1990-07-01), Comer

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