Vibration monolithic gyroscope

Details Vibration monolithic gyroscope Vibration monolithic gyroscope

1991-12-19

1994-07-19

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

G01P 904

Patent

active

053298152

ABSTRACT:
A vibration gyroscope including a central mounting post and a planar mass symmetrically affixed thereto for vibrational movement. The post and mass are formed from a single layer of semiconductor material deposited on a substrate, such as silicon. Capacitive plates positioned below and above the mass, formed by depositing two additional layers of semiconductor material, are utilized for driving the mass and sensing vibration produced by the Coriolis effect.

REFERENCES:
patent: 4598585 (1986-07-01), Boxenhorn
patent: 4736629 (1988-04-01), Cole
patent: 4884446 (1989-12-01), Ljung

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