Flow sensor

Details Flow sensor Flow sensor

1982-09-30

1985-02-26

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

Thermal type

G01F 168

Patent

active

045011443

ABSTRACT:
A flow sensor comprising a pair of thin film heat sensors and a thin film heater is disclosed. A base supports the sensors and heater out of contact with the base with the sensors disposed on opposite sides of the heater and closely adjacent thereto.

REFERENCES:
patent: 3801949 (1974-04-01), Larrabee
patent: 4320655 (1982-03-01), Kammermaier et al.
patent: 4343768 (1982-08-01), Kimura
Malin et al., "Mass Flow Meter", IBM Tech. Disclosure, vol. 21, #8, 1/79.

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