Optical displacement measurement apparatus and information recor

Details Optical displacement measurement apparatus and information recor Optical displacement measurement apparatus and information recor

1997-07-21

1999-12-21

Font, Frank G.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356363, G01B 902

Patent

active

060056673

ABSTRACT:
This invention relates to an apparatus for optically measuring the relative displacement of an object with a diffraction grating, and the apparatus has a light projection system for spot-projecting a light beam onto the diffraction grating and light detection means for receiving an interference light beam obtained by multiplexing diffracted light beams of different orders from the spot projection position on the diffraction grating in a state in which the wavefronts of the diffracted light beams are matched with each other. The relative displacement of the object is measured upon light reception of the light detection means.

REFERENCES:
patent: 4658132 (1987-04-01), Nishiura et al.
patent: 4766310 (1988-08-01), Michel
patent: 4902133 (1990-02-01), Tojo et al.

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