Apparatus for and method of optical inspection in total internal

Details Apparatus for and method of optical inspection in total internal Apparatus for and method of optical inspection in total internal

1990-09-26

1999-12-21

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356357, 356382, 356348, 356356, 359 10, 359 12, 2502012, G01B 1102

Patent

active

060056665

ABSTRACT:
Apparatus for and a method of optical inspection in a total internal reflection holographic imaging system. Multi wavelength laser beams are directed onto a prism supporting a first substrate containing pre-recorded hologram which is to be imaged onto a recording medium of a second substrate, the multi wavelength beams being normal to both substrates. The distance between the two substrates is measured by interferometric techniques. Actuators are provided for adjusting the distance between the two substrates, these actuators being energized to cause minute adjustments of the spacing during a scanning operation whereby the imaging of the pre-recorded hologram is ensured at the correct focus throughout the scanning operation.

REFERENCES:
patent: 4857425 (1989-08-01), Phillips
patent: 4966428 (1990-10-01), Phillips

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