Method of manufacturing III-V group compound semiconductor

Details Method of manufacturing III-V group compound semiconductor Method of manufacturing III-V group compound semiconductor

1992-03-27

1994-04-05

Kunemund, Robert

Brushing, scrubbing, and general cleaning

156614, 437 81, 437126, C30B 2502

Patent

active

053001850

ABSTRACT:
Disclosed is a method of efficiently manufacturing a III-V group compound semiconductor that carbon mixing is reduced, wherein a compound represented by the formula (1) or (2) is used as a V group source: ##STR1## wherein X represents a V group element, n represents integer of 1 to 3, and Y represents electron-releasing group bonded to a position selected from 2-, 4-, and 6-positions, ##STR2## wherein X represents a V group element, m represents an integer of 1 or 2, and Y represents electron-releasing group bonded to a position selected from 2- and 4-positions.

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patent: 3647429 (1972-03-01), Goldman et al.
patent: 4720560 (1988-01-01), Hui et al.
patent: 4734514 (1988-03-01), Melas et al.
patent: 5003092 (1991-03-01), Beachley
patent: 5079184 (1992-01-01), Hatano et al.
patent: 5124278 (1992-06-01), Bohling et al.
patent: 5149853 (1992-09-01), Erdmann et al.

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