Optics: measuring and testing – By polarized light examination – With birefringent element
Patent
1994-01-10
1995-07-11
Turner, Samuel A.
Optics: measuring and testing
By polarized light examination
With birefringent element
356359, G01B 902
Patent
active
054326060
ABSTRACT:
This invention relates to a means of analyzing the shape of a surface to be measured by generating interference fringes containing a spatial carrier produced by tilting the wavefronts from a reference surface and the surface to be measured, taking several measurements of these interference fringes while varying the optical path length of the reference surface by means of a phase shift device, applying a spatial fringe scan method to the interference fringe data so as to detect the optical path length variation produced by the phase shift device, applying a temporal fringe scan method to this optical path length variation and several interference fringe data so as to analyze the interference fringes, and then subtracting the spatial carrier from the analytical results.
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Noguchi Masato
Oono Masahiro
Asahi Kogaku Kogyo Kabushiki Kaisha
Turner Samuel A.
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