Exposure apparatus

Details Exposure apparatus Exposure apparatus

1992-04-06

1992-12-01

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Step and repeat

355 41, G03B 2742

Patent

active

051683067

ABSTRACT:
An exposure apparatus where a mask table having an exposing pattern and a work to be exposed are relative to each other movable, wherein the moving amount of the mask table is detected by a scale image formed through a projection lens system, so that even if the projection lens system has a magnification error, by optically offsetting it, the moving amount of the mask table can be detected. Thus, a more accurate control can be obtained so that a mask image can be more precisely reproduced on a work.

REFERENCES:
patent: 3494697 (1970-02-01), Nygaard
patent: 3712740 (1973-01-01), Hennings
patent: 4367046 (1983-01-01), Lacombat
patent: 4662754 (1987-05-01), Mayer
patent: 4711567 (1987-12-01), Tanimoto
patent: 4794426 (1988-12-01), Nishi
patent: 4822975 (1989-04-01), Torigoe
patent: 4855792 (1989-08-01), Holbrook et al.
patent: 4931830 (1990-06-01), Suwa et al.
patent: 4952970 (1990-08-01), Suzuki et al.
patent: 4967088 (1990-10-01), Stengl et al.
patent: 5026145 (1991-06-01), Marui et al.

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