Surface wave device

Details Surface wave device Surface wave device

1994-01-13

1995-07-11

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

333155, H01L 4108

Patent

active

054323924

ABSTRACT:
Disclosed herein is a surface wave device utilizing Love waves, which comprises an LiNbO.sub.3 single-crystalline substrate (2), at least one interdigital transducer (5) formed thereon and a ZnO thin film (6) formed to cover the interdigital transducer (5). Assuming that H represents the thickness of the ZnO thin film and .lambda. represents the wavelength of the as-excited Love waves, a ratio H/.lambda. is set in a range of 0.01 to 0.2.

REFERENCES:
patent: 4236095 (1980-11-01), Ono et al.
patent: 4243960 (1981-01-01), White et al.
patent: 4342012 (1982-07-01), Inaba et al.
patent: 4544857 (1985-10-01), Shimizu et al.
patent: 4978879 (1990-12-01), Satoh et al.
patent: 5160869 (1992-11-01), Nakahatat et al.
patent: 5294858 (1994-03-01), Nakahata et al.

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