Method of and apparatus for generating low-energy neutral partic

Details Method of and apparatus for generating low-energy neutral partic Method of and apparatus for generating low-energy neutral partic

1994-04-19

1995-07-11

Dzierzynski, Paul M.

Radiant energy

Electrically neutral molecular or atomic beam devices and...

H05H 300

Patent

active

054323428

ABSTRACT:
In a low-energy neutral particle beam generating apparatus having a main discharge chamber, a high-density electron beam generated in an electron beam generating unit is introduced into a main discharge chamber where it is diverged by a positive voltage applied to an anode electrode and a multipolar magnetic field formed by a permanent magnet, a main discharge gas introduced into the main discharge chamber is ionized by collision with the diverged electron beam, thereby generating a uniform plasma in the main discharge chamber, low-energy ions are drawn out from the plasma and electrically neutralized by a perforated electrode having a multiplicity of holes, thereby obtaining a low-energy neutral particle beam of large diameter without the need of using a complicated, large-sized apparatus.

REFERENCES:
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patent: 4297615 (1981-10-01), Goebel et al.
patent: 5243189 (1993-09-01), Nagai et al.
Shimokawa et al., "A Low-Energy Fast-Atom Source", Nuclear Instruments & Methods in Physics Research, vol. B33, No. 1-4, Jun. 1988, pp. 867-870.
Mase et al., "Superdense Hollow Cathode Glow Discharge and its Application to Ion Sources", Nuclear Instruments and Methods in Physics Research, (1989), pp. 120-123.
Johshin Uramoto, "An Accelerated Plasma Electron Beam for Vacuum Metallurgy", Mar. 20, 1977.
Joshin Uramoto, "Research of High Current and Long Life Cathode for Ion Plating", Jun. 11, 1982.
Shimokawa et al., "A Fast Atom Beam Source with a Hollow Cathode", The Eleventh Symposium on Ion Sources and Ion-Assisted Technology, Jun. 1-3, 1987.

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