Resistive component comprising a CRSI resistive film

Stock material or miscellaneous articles – Composite – Of inorganic material

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428689, 428699, 428701, 428702, 428469, 428472, 428336, 338308, 338314, B32B 900, H01C 1012

Patent

active

057336695

ABSTRACT:
A resistive component which is composed of one or more resistive films which, if necessary, may be provided on a substrate, and at least one of which is on the basis of CrSi, the resistive film on the basis of CrSi comprising 5-50 at. % Cr, 10-70 at. % Si, 5-50 at. % O and at least one element of the group formed by B, C and N in a concentration of 1-50 at. %. The advantageous properties of the resistive component in accordance with the invention are based on the reactive incorporation of oxygen and carbon or oxygen and nitogen or oxygen and carbon and nitrogen into resistive films on the basis of CrSi.

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