Electron-optical system for making a pseudoparallel micro electr

Details Electron-optical system for making a pseudoparallel micro electr Electron-optical system for making a pseudoparallel micro electr

1990-05-31

1991-11-05

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250398, H01J 37141

Patent

active

050632965

ABSTRACT:
An electron-optical system devised so as to generate a pseudoeparallel micro electron-beam converging at a converging angle of 1.times.10.sup.-3 radian. The system comprises a condenser lens assembly and an asymmetric objective lens whose smaller field gradient side is directed to the condenser lens assembly. In another electron-optical system achieved by modifying the above system, the converging angle of the electron beam is made variable with an additional objective lens inserted between the condenser lens assembly and the asymmetric objective lens. The conversion angle can be varied by varying the conversion powers of both the objective lenses.

REFERENCES:
patent: 3937958 (1976-02-01), Rusch et al.
patent: 4882486 (1989-11-01), Kruit
patent: 4961003 (1990-10-01), Yonezawa

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