Surface cleaning using a cryogenic aerosol

Details Surface cleaning using a cryogenic aerosol Surface cleaning using a cryogenic aerosol

1990-06-05

1991-11-05

Pal, Asok

Cleaning and liquid contact with solids

Processes

Using solid work treating agents

B08B 500

Patent

active

050628984

ABSTRACT:
A method is disclosed for cleaning microelectronics surfaces using an aerosol of at least substantially solid argon particles which impinge upon the surface to be cleaned and then evaporate and the resulting gas is removed by venting along with the contaminants dislodged by the cleaning method.

REFERENCES:
patent: 4806171 (1989-02-01), Whitlock et al.
Airco Special Gases "Spectra-Clean.RTM. CO.sub.2 " brochure.
Chemical Processing; Nov. 1989, p. 54.
Semiconductor International; Nov. 1989; p. 16; Mitsubishi's LSI Research and Development Laboratory.
Abstract No. 377; "Ultraclean Ice Scrubber with Jetting Fine Ice Particles"; T. Ohmori, T. Fukumutu, T. Kato.
S. A. Hoenig; "Cleaning Surfaces with Dry Ice"; Compressive Air Magazine; Aug. 1986; pp. 22-24.
S. A. Hoenig, et al.; "Control of Particulate Contamination by Thermophoresis, Electrostatics, and Dry Ice Techniques"; Ninth ICCCS Proceedings 1988 Institute of Environmental Sciences; pp. 671-678.

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