Method of making planarized EPROM array

Details Method of making planarized EPROM array Method of making planarized EPROM array

1989-02-14

1991-03-05

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437 51, 437 52, 437191, 437193, 437228, 437233, 437235, H01L 2170

Patent

active

049977814

ABSTRACT:
An array of floating gate memory cells is formed at a face of a semiconductor layer (10). The array includes a plurality of elongate spaced-apart parallel source/drain regions (12). A thick dielectric layer (14) is formed on the face. A plurality of spaced-apart orifices (16) are formed through the thick dielectric layer (14) to the face, each orifice exposing portions of two adjacent source/drain regions (12) and extending therebetween. A plurality of thin first gate insulators (18) are formed on the face in the orifices (16). Next, conductive floating gate electrodes (20) are formed on the orifices (16) and the first gate insulators (18), with the combined thickness of a floating gate electrode (20) and a first gate insulator (18) approximating the thickness of the thick dielectric layer (14). A planarized surface is thus presented for the deposition of an interlevel insulator (22, 24) and a plurality of control gate electrodes (26).

REFERENCES:
patent: 3674551 (1972-07-01), Athanas
patent: 4055884 (1977-11-01), Jambotkar
patent: 4258466 (1981-03-01), Kuo et al.
patent: 4295265 (1981-10-01), Horiuchi et al.
patent: 4505030 (1985-03-01), Jeuch
patent: 4545852 (1985-10-01), Barton
patent: 4697330 (1987-10-01), Paterson et al.
patent: 4713142 (1987-12-01), Mitchell et al.
patent: 4833514 (1989-05-01), Esquivel et al.

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