Manufacture of tapered waveguides

Details Manufacture of tapered waveguides Manufacture of tapered waveguides

Filed on

1997-07-10

Date issued

1999-12-21

Examiner

Young, Lee

Patent Class

Metal working

SubClass

Method of mechanical manufacture

SubSubClass

Electrical device making

Other Related Categories

385 43, H01P 1100

Type

Patent

Status

active

Patent number

060032227

Description

ABSTRACT:
The specification describes techniques for fabricating tapered waveguides in planar photonic integrated circuits with the tapers formed in the z-direction (thickness). The tapers are formed by depositing the core layer in two operations. After depositing the first core layer, the layer is masked, and a step is formed in the first layer. When the second core layer is deposited over the step, a smooth taper results. The core layers are preferably formed by flame hydrolysis. During consolidation the two core layers coalesce into a single homogeneous layer with a smooth taper in the thickness dimension of the waveguide.

REFERENCES:
patent: 4998793 (1991-03-01), Henry et al.
patent: 5133029 (1992-07-01), Baran et al.
patent: 5402511 (1995-03-01), Malone et al.
patent: 5473710 (1995-12-01), Jaw et al.
patent: 5703974 (1997-12-01), Sasaki et al.

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