Ion source

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source

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Details

250423R, 250427, 31511141, 31511191, H01J 2704

Patent

active

049316982

ABSTRACT:
An ion source comprising a discharge chamber that has a gas inlet and an ion exit, two pairs of cathodes that are disposed on the side surfaces of said discharge chamber, two pairs of anodes, each anode being disposed in a space between the adjacent cathodes, and a pair of solenoids that are wrapped around one pair of cathodes so as to be mutually repulsive magnetically, wherein there is no magnetic field in the central axis of the other pair of cathodes around which no solenoids are wrapped.

REFERENCES:
patent: 4259145 (1981-03-01), Harper et al.
patent: 4344019 (1982-08-01), Gavin et al.
patent: 4630566 (1986-12-01), Asmussen et al.
patent: 4728862 (1988-03-01), Kovarik et al.
patent: 4800281 (1989-01-01), Williamson

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