Method for deposition of hexagonal diamond using hydrogen plasma

Details Method for deposition of hexagonal diamond using hydrogen plasma Method for deposition of hexagonal diamond using hydrogen plasma

1991-02-26

1993-09-07

Paschall, Mark H.

Electric heating

Metal heating

By arc

21912147, 21912151, 427122, 427249, 427446, B23K 900

Patent

active

052431703

ABSTRACT:
An improved method is proposed for providing a coating film of diamond on the surface of, for example, a cutting tool as the substrate by the plasma jet deposition method, in which the deposited diamond film has, different from the cubic crystalline structure formed under conventional conditions, a predominantly hexagonal crystalline structure so as to greatly enhance the advantages obtained by the diamond coating of the tool in respect of the hardness and smoothness of the coated surface. The improvement comprises: using hydrogen alone as the plasma-generating gas; controlling the pressure of the plasma atmosphere not to exceed 300 Torr; keeping the substrate surface at a temperature of 800.degree.-1200.degree. C.; and making a temperature gradient of at least 13,000.degree. C./cm within the boundary layer on the substrate surface.

REFERENCES:
patent: 4842945 (1989-06-01), Ito et al.
patent: 4919974 (1990-04-01), McCune et al.
patent: 4992082 (1991-02-01), Drawl et al.
patent: 5052339 (1991-10-01), Vakerlis et al.
patent: 5096736 (1992-03-01), Anthony et al.

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