Coating apparatus – Gas or vapor deposition – With treating means
Patent
1988-08-02
1990-06-05
Beck, Shrive
Coating apparatus
Gas or vapor deposition
With treating means
118722, 118 501, 427 431, 427 35, 250398, 2504923, 239584, C23C 1604
Patent
active
049304399
ABSTRACT:
An apparatus for treating a sample comprises an ion source for irradiating a designated area of the sample with a focused ion beam, a vessel for storing compound to be vaporized, a heater surrounding the vessel for heating the compound to vaporize the same inside the vessel to produce compound vapor, and a nozzle for directing the compound vapor in the form of a vapor stream onto the designated area of the sample being irradiated with the focused ion beam. A valve is disposed along the fluid communication path between the vessel and the nozzle and has a closed state for blocking the flow of compound vapor through the nozzle and an open state for permitting the flow of compound vapor through the nozzle. The apparatus can be used to form pattern films on substrates, to repair defects in photo-masks and X-ray masks, and to cut or connect wiring in integrated circuits.
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Kaito Takashi
Nakagawa Yoshitomo
Sato Mitsuyoshi
Adams Bruce L.
Bashore Alain
Beck Shrive
Seiko Instruments Inc.
Wilks Van C.
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