Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1994-10-04
1995-09-05
Budd, Mark O.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
310313R, 310344, 364821, H01L 4108
Patent
active
054481260
ABSTRACT:
In a surface acoustic wave-semiconductor composite device such as a surface acoustic wave convolver, a piezoelectric plate and a semiconductor plate are layered directly or with a gap between them. Input electrodes are provided to apply a plurality of input signals to the piezoelectric plate to excite surface acoustic waves, while an output electrode is provided to detect a convolution output signal of a change in electric potential of the semiconductor plate at an interface of the semiconductor plate with the piezoelectric plate. In the layered structure, the semiconductor plate is bonded directly to the piezoelectric plate by hydrogen bonds between hydroxyl groups or by covalent or ionic bonds of oxygen atoms with component atoms of the piezoelectric and semiconductor plates. In modified structures, an inorganic thin film is applied to one of the piezoelectric and semiconductor plates, while the inorganic thin film is bonded directly to the other of the two plates. The surface acoustic wave-semiconductor composite device can be prepared by using direct bonding in an atomic order, with a thickness of a direct bonding layer of 20 nm or less. Then, it has a low insersion loss and a high efficiency, and it is stable thermally and mechanically. Further, its characteristics can be reproduced well.
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Bers et al., "Surface state memory in surface acoustoelectric correlator", Applied Physics Letters, vol. 25, No. 3, Aug. 1974, pp. 133-135.
Yamanouchi et al., "Propagation and Amplification of Rayleigh Waves and Piezoelectric Leaky Surface Waves in LiNbO.sub.3 ", J. Appl. Phys., vol. 43, No. 3, Mar. 1972, pp. 856-862.
Eda Kazuo
Taguchi Yutaka
Budd Mark O.
Matsushita Electric - Industrial Co., Ltd.
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