Fishing – trapping – and vermin destroying
Patent
1988-03-04
1990-03-06
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437193, 437203, 148DIG20, 148DIG26, H01L 21283, H01L 2120
Patent
active
049065939
ABSTRACT:
A method of producing a semiconductor device comprising the steps of: forming a window or contact hole in an insulating layer to expose a portion of a semiconductor substrate or a lower conductor line; forming semiconductor material (silicon) in the window; substituting the material with a metal (tungsten) by reaction of the semiconductor material with a metal compound (WF.sub.6 gas); and forming a conductor line over the metal within the window.
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Furumura Yuji
Goto Hiroshi
Inoue Shin'ichi
Ogawa Tsutomu
Ohyama Yasushi
Fujitsu Limited
Hearn Brian E.
Quach T. N.
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