Digital capacitive accelerometer

Details Digital capacitive accelerometer Digital capacitive accelerometer

1994-03-31

1995-09-05

Chilcot, Jr., Richard E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

G01P 15125

Patent

active

054470684

ABSTRACT:
A capacitive accelerometer includes electrode plates supported and aligned for movement in the direction of a substrate in which they are supported. Preferably, the plates are formed a surface micro machining, and each plate includes capacitor forming surfaces aligned at an acute angle with respect to each other. In addition, each capacitive accelerometer is formed as a differential capacitor so that one movable plate is disposed between to relatively stationary plates and a plurality of stationary and movable plates are aligned in a series along a portion of the substrate. The suspension comprises a cantilevered support arrangement for the plates.

REFERENCES:
patent: 3784897 (1974-01-01), Norrie
patent: 3911738 (1975-10-01), Fischer
patent: 4177421 (1979-12-01), Thornburg
patent: 4553436 (1985-11-01), Hansson
patent: 4641539 (1987-02-01), Vilimek
patent: 4711128 (1987-12-01), Boura
patent: 5095752 (1992-03-01), Suzuki et al.
patent: 5146389 (1992-09-01), Ristic et al.
patent: 5243861 (1993-09-01), Kloeck et al.

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