Mold method for forming vacuum field emitters and method for for

Electric lamp or space discharge component or device manufacturi – Process – Generating gas or vapor within an envelope – or coating by...

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445 6, 445 24, 445 50, 445 51, 438 20, H01J 938

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active

061322784

ABSTRACT:
Diamond microtip field emitters are used in diode and triode vacuum microelectronic devices, sensors and displays. Diamond diode and triode devices having integral anode and grid structures can be fabricated. Ultra-sharp tips are formed on the emitters in a fabrication process in which diamond is deposited into mold cavities in a two-step deposition sequence. During deposition of the diamond, the carbon graphite content is carefully controlled to enhance emission performance. The tips or the emitters are treated by post-fabrication processes to further enhance performance.

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