Method for plasma treatment of small diameter tubes

Details Method for plasma treatment of small diameter tubes Method for plasma treatment of small diameter tubes

1989-04-10

1990-08-14

Beck, Shrive

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427 38, 427 40, 427 41, 427237, 427238, 156643, C23C 1650

Patent

active

049486284

ABSTRACT:
An apparatus for generating a plasma in the lumen of a small diameter tube includes a housing having a diaphragm which separates the housing into a first chamber equipped with a gas inbleed assembly and a second chamber connected to a vacuum source. Parallel plate electrodes in the first chamber are encased in a dielectric which prevents substantially all plasma discharge external of a plasma zone between the electrodes. A conduit maintains gas flow between the chambers. A bore through the dielectric includes the plasma zone and receives the tube to be plasma treated.
A method for treating the luminal wall of a plastic tube includes positioning a tube in the plasma zone, evacuating the chambers, bleeding a gas into the chambers, and delivering radiofrequency power to the electrodes. A long tube may be drawn through the plasma zone, or the dielectric and electrodes may be moved past the tube.

REFERENCES:
patent: 4261806 (1981-04-01), Asai et al.
patent: 4473596 (1984-09-01), Beerwald et al.
patent: 4692347 (1987-09-01), Yasuda

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