Method of making a surface acoustic wave device

Details Method of making a surface acoustic wave device Method of making a surface acoustic wave device

1998-01-08

2000-10-17

Hall, Carl E.

Metal working

Piezoelectric device making

310313R, H01L 4122

Patent

active

061312576

ABSTRACT:
A method of producing a SAW (Surface Acoustic Wave) device, including the steps of implanting ions in an entire surface of a piezoelectric member of the SAW device, so that an ion implantation layer is formed therein; performing a heat treatment of the piezoelectric member, so that a heat-treated ion implantation layer is formed in the entire surface of the piezoelectric member; and providing an electrode of a comb type resonator on the heat-treated ion implantation layer.

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