Apparatus and method for transferring wafers between a cassette

Material or article handling – Device for emptying portable receptacle – For emptying contents thereof into portable receiving means

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414417, 414786, B65G 6530

Patent

active

049477846

ABSTRACT:
An apparatus for transferring wafers comprises a turntable for orienting a plurality of wafers which are loaded in a cassette, a lifting mechanism for lifting the wafers away from the cassette, a plurality of opening/closing chuck mechanisms, and a slide movement mechanism for conveying the wafers which are held by the opening/closing mechanism onto a boat. The cassette on the turntable is turned selectively through an angle of 180.degree. and wafers are lifted by the link mechanism all at a time and selectively held by the opening/closing chuck mechanism. The wafers thus held are conveyed to a location of a boat where they are loaded onto the boat in a face-to-face relation.

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