Plasma desmearing apparatus and method

Details Plasma desmearing apparatus and method Plasma desmearing apparatus and method

1981-04-10

1984-01-10

O'Keefe, Veronica

Chemistry: electrical and wave energy

Processes and products

204298, C23F 100

Patent

active

044252102

ABSTRACT:
This invention is based on desmearing holes of multi-layered printed wiring boards by flowing plasma through the holes. Desmearing of plasma etching applies active gases to organic surfaces causing a cleaning reaction and removal of the smear.

REFERENCES:
patent: 4012307 (1977-03-01), Phillips
patent: 4123663 (1978-10-01), Horike
patent: 4148705 (1979-04-01), Battey et al.
patent: 4230553 (1980-10-01), Bartlett et al.
patent: 4264393 (1981-04-01), Gorin et al.
patent: 4277321 (1981-07-01), Bartlett et al.
patent: 4282077 (1981-08-01), Reavill
patent: 4285800 (1981-08-01), Welty
patent: 4287851 (1981-09-01), Dozier
patent: 4289598 (1981-09-01), Engle
patent: 4307283 (1981-12-01), Zajac

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