Thin film actuated mirror array for use in an optical projection

Details Thin film actuated mirror array for use in an optical projection Thin film actuated mirror array for use in an optical projection

1995-07-20

1997-03-11

Epps, Georgia Y.

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359291, 359224, 359849, 359850, G02B 2600

Patent

active

056107579

ABSTRACT:
An array of M.times.N thin film actuated mirrors comprises a switching matrix, an array of M.times.N pairs of supporting members, and an array of M.times.N actuating structures, wherein the active matrix includes a substrate and a first, a second and a third conduction line patterns printed on top thereof, and each of the actuating structures is provided with a pair of actuators and a pair of gate actuators. With the presence of the gate actuators in each of the actuating structures in conjunction with the first, the second and the third conduction line patterns on the switching matrix, it is possible to eliminate the use of transistors in the array of M.times.N thin film actuated mirrors.

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