Scanning scattering microscope with hemispherical mirror and mic

Details Scanning scattering microscope with hemispherical mirror and mic Scanning scattering microscope with hemispherical mirror and mic

1989-07-21

1990-09-04

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250216, 356446, 356371, H01J 314, G01N 2186, G01N 2147

Patent

active

049547224

ABSTRACT:
A method and apparatus (10) for producing two-dimensional micrographs of overall surface microtopography of a given specimen (19) by using a photodetector (22) to measure the off-specularly reflected light from a focussed light beam (50) which is projected through a hemispherical mirror (20) onto the specimen surface as the specimen surface is scanned by the focused beam of light (50). Scanning can be accomplished either by moving the specimen surface (19) as a result of moving the sample holding member (18) or by moving the focused beam of light by means of a light beam deflection device (25).

REFERENCES:
patent: 4360275 (1982-11-01), Louderback
patent: 4423331 (1983-12-01), Koizumi et al.
patent: 4548506 (1985-10-01), Elson
patent: 4659229 (1987-04-01), Hernicz
patent: 4673818 (1987-06-01), Guerra
patent: 4815858 (1989-03-01), Snail

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