Method and apparatus for surface diagnostics

Details Method and apparatus for surface diagnostics Method and apparatus for surface diagnostics

1986-05-16

1988-03-22

Church, Craig E.

Radiant energy

Ionic separation or analysis

With sample supply means

250281, 250282, 250287, 250423P, H01J 4910

Patent

active

047330732

ABSTRACT:
Method and apparatus for mass spectral analysis of unknown species of matter present on a surface even in extremely low concentrations. A probe beam such as an ion beam, electron beam or laser is directed to the surface under examination to remove a sample of material. An untuned, high-intensity laser is directed to a spatial region proximate to the surface. The laser has sufficient intensity to induce a high degree of nonresonant, and hence non-selective, photoionization of the sample of material within the laser beam. The non-selectively ionized sample is then subjected to mass spectral analysis to determine the nature of the unknown species.

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