Method of manufacture of a uniphase CCD

Details Method of manufacture of a uniphase CCD Method of manufacture of a uniphase CCD

1987-03-30

1988-03-22

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437 53, H01L 21425, H01L 2978

Patent

active

047328681

ABSTRACT:
A method for fabricating a uniphase virtual electrode CCD uses only a single mask of different materials, portions of which are selectively removed, for a series of ion implantation steps. In this way, there is achieved the desired potential profile for the four sections of each cell without any need for aligning masks between successive implantation steps.

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