Thermal head

Details Thermal head Thermal head

1986-12-02

1988-11-22

Goldberg, E. A.

Recorders

Thermal recording

219216, 338308, 427103, 427402, 428627, 428615, 428621, 428629, G01D 1510, H01C 1012, B05D 512, B32B 1506

Patent

active

047869160

ABSTRACT:
A thermal head in which a glazed layer, an improved undercoat layer, a heat generating resistor layer, an electrical power supply conductor layer and a protection layer are successively laminated to the surface of an insulating substrate, in which the undercoat layer is composed of an aluminum nitride (AlN) film. The method of manufacturing the thermal head comprises forming the aluminum nitride (AlN) film by sputtering an Al target in a gas mixture of argon and nitrogen and forming the heat generating resistor layer and the electrical power supply conductor layer, that is, three layers in total successively formed by sputtering. Because of the good heat conductivity of aluminum nitride film, the temperature distribution in the heat generating portion is made uniform and localized heat generation can be avoided, as it also prevents the destruction of the heat generating resistor layer or the protection layer due to the temperature difference upon heat generation. The temperature distribution in the heat generating portion is made uniform to eliminate the heat generation dots destructed at an applied low electric power, thereby significantly improving the reliability of the thermal head. Further, by the method of manufacturing the thermal head according to this invention, the continuity between each of the layers is favorable and a thermal head of a high reliability can be obtained.

REFERENCES:
patent: 4612433 (1986-09-01), Nagaoka et al.
patent: 4617575 (1986-10-01), Fuyama et al.
Hewlett-Packard Co. Abstract, Sep. 1980, "A High Speed, High Performance, Scanning Thin Film Thermal Printhead", pp. 122-127, Kanazawa, Gilbert and Trueba.

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